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Title:
リソグラフ装置及び装置の製造方法
Document Type and Number:
Japanese Patent JP4190469
Kind Code:
B2
Abstract:
A holographic mask includes a plurality of pixels each imparting a calculated phase and/or amplitude change to the projection beam to provide an image that is parallel to the mask. The holographic mask is used displaced from the best object plane of the projection lens.

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Inventors:
Bernardus Hendricks Wilhelms Hendricks
Jan Efert van der Welf
Application Number:
JP2004184462A
Publication Date:
December 03, 2008
Filing Date:
June 23, 2004
Export Citation:
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Assignee:
AS M Netherlands B.V.
Koninklijke Philips Electronics N.V.
International Classes:
G03F1/08; G03B27/00; G03C5/00; G03F7/20; H01L21/027
Domestic Patent References:
JP10142806A
JP4058244A
Foreign References:
WO2003010803A1
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki



 
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