Title:
電界放射型ディスプレイ装置の製造方法
Document Type and Number:
Japanese Patent JP4330795
Kind Code:
B2
Abstract:
A structure and method for forming an anodized row electrode for a field emission display device. In one embodiment, the present invention comprises depositing a resistor layer over portions of a row electrode. Next, an inter-metal dielectric layer is deposited over the row electrode. In the present embodiment, the inter-metal dielectric layer deposited over portions of the resistor layer and over pad areas of the row electrode. After the deposition of the inter-metal dielectric layer, the row electrode is subjected to an anodization process such that exposed regions of the row electrode are anodized. In so doing, the present invention provides a row electrode structure which is resistant to row to column electrode shorts and which is protected from subsequent processing steps.
Inventors:
Kaishore, Kay. Chakra Beauties
Application Number:
JP2000514297A
Publication Date:
September 16, 2009
Filing Date:
September 03, 1998
Export Citation:
Assignee:
Canon Inc
International Classes:
H01J9/02; H01J3/02; H01J9/14; H01J29/04; H01J29/46; H01J31/12
Domestic Patent References:
| JP2239539A | ||||
| JP7249368A | ||||
| JP5094760A | ||||
| JP7160204A | ||||
| JP2046636A | ||||
| JP6124649A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hakozaki Yukio
Keizo Nishiyama
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hakozaki Yukio
Keizo Nishiyama