Title:
【発明の名称】微薄膜ポンプ本体の製造方法
Document Type and Number:
Japanese Patent JP2000510548
Kind Code:
A
Abstract:
A method of producing a pump body having an inlet opening provided with an inlet valve (106) and an outlet opening provided with an outlet valve (108), said method comprising as a first step the step of structuring a respective first main surface of a first and of a second semiconductor disc (200) for defining a valve flap structure (202) of the inlet valve and a valve seat structure (204) of the outlet valve in the first disc and a valve flap structure of the outlet valve and a valve seat structure of the inlet valve in the second disc. Following this, a valve flap well structure (206; 216) and a valve opening well structure (208; 218) are formed in a predetermined relationship with the valve flap structures and the valve seat structures in a respective second main surface of the first and of the second semiconductor disc. The first main surfaces of said first and second semiconductor discs are connected in such a way that the respective valve flap structure is arranged in a predetermined relationship with a respective valve seat structure. Finally, the respective second main surface of said first and of said second semiconductor disc is etched at least in the area of the valve flap well structure and of the valve opening well structure so as to expose the valve flaps and open the valve seats.
Inventors:
Rinnemann Reinhard
Richter Martin
Kruge Stefan
Voias Peter
Richter Martin
Kruge Stefan
Voias Peter
Application Number:
JP54873098A
Publication Date:
August 15, 2000
Filing Date:
April 28, 1998
Export Citation:
Assignee:
Frauenhofer Gesellschaft Tool Felderung del Angewanten Forschung Afao
International Classes:
F04B43/02; F04B43/04; F15C5/00; F16K99/00; (IPC1-7): F04B43/02; F15C5/00
Attorney, Agent or Firm:
Morishita Takeichi