Title:
SEMICONDUCTOR TEST SYSTEM
Document Type and Number:
Japanese Patent JPH065675
Kind Code:
A
Abstract:
PURPOSE: To provide a low-cost semiconductor test system that reduces the time for a wafer treatment when a pellet is tested.
CONSTITUTION: When various kinds of wafers are mixedly kept in the same wafer carrier, wafer ID data recognized by a wafer characteristic check prober 2 are sent to a pellet check prober 3 through the intermediary of a host computer 1, whereby the wafers of the same kind are selected from the wafer carrier where various kinds of wafers are mixedly kept, and a pellet test can be carried out.
Inventors:
TAKAHASHI MASAYUKI
Application Number:
JP16321792A
Publication Date:
January 14, 1994
Filing Date:
June 23, 1992
Export Citation:
Assignee:
NEC YAMAGATA LTD
International Classes:
H01L21/66; G01R31/28; (IPC1-7): H01L21/66; G01R31/28
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)
Next Patent: 半導体装置の製造方法