Title:
微弱光検出器の製造方法
Document Type and Number:
Japanese Patent JP4340751
Kind Code:
B2
Abstract:
This invention provides a method for manufacturing a circuit for photon number counting without destroying a FET within the circuit by manufacturing a photodetector for weak light, the photodetector for weak light comprising a circuit on a substrate, the circuit comprising light detection means and a field effect transistor (FET), the method comprising: a light detection means connection step; an FET electrode-to-substrate electrode connection step; an external electrode connection step, a light detection means-to-gate connection step.
Inventors:
Mikio Fujiwara
Masahide Sasaki
Makoto Akiba
Masahide Sasaki
Makoto Akiba
Application Number:
JP2003272456A
Publication Date:
October 07, 2009
Filing Date:
July 09, 2003
Export Citation:
Assignee:
National Institute of Information and Communications Technology
International Classes:
G01J1/02; G01J1/44; H01J40/14; H01L27/14; H01L31/00; H01L31/10
Domestic Patent References:
| JP2003149047A | ||||
| JP11168670A | ||||
| JP7270825A | ||||
| JP8032022A | ||||
| JP3123180A | ||||
| JP3111724A | ||||
| JP3752547B2 | ||||
| JP3760240B2 | ||||
| JP3760241B2 | ||||
| JP2001326379A |
Attorney, Agent or Firm:
Takayuki Hirose
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