Title:
A profile adjustment method and a polish device of the polishing member used for a polish device
Document Type and Number:
Japanese Patent JP5964262
Kind Code:
B2
Inventors:
Takahiro Shimano
Mutsumi Tanikawa
Naonori Matsuo
Yamaguchi Tosho
Kazuhide Watanabe
Mutsumi Tanikawa
Naonori Matsuo
Yamaguchi Tosho
Kazuhide Watanabe
Application Number:
JP2013034419A
Publication Date:
August 03, 2016
Filing Date:
February 25, 2013
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B37/00; B24B53/12; H01L21/304
Domestic Patent References:
| JP2012254490A | ||||
| JP2012009692A | ||||
| JP2002200552A | ||||
| JP2003089051A |
Foreign References:
| US6113462 |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa
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