Title:
A projection aligner provided with a plurality of projection object lenses
Document Type and Number:
Japanese Patent JP6116788
Kind Code:
B2
Abstract:
The invention relates to a projection light facility (1) comprising a plurality of projection objective lenses (10) for reproducing each object field (50) on the image field (60). The image fields (60) are located in a substrate area (40) on the substrate plane, wherein said substrate area (40) is displaceable in a predefined scanning direction (5) with respect to the plurality of projection objective lenses, at least one projection objective lens is provided with a partial section of the optical axis thereof which is not perpendicular to the substrate plane and the projection of said partial section on the substrate plane is not parallel to the scanning direction (5).
Inventors:
Dodock, Aurelian
Julich, Wilhelm
Feltman, Heiko
Julich, Wilhelm
Feltman, Heiko
Application Number:
JP2008518844A
Publication Date:
April 19, 2017
Filing Date:
June 28, 2006
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
| JP10064807A | ||||
| JP2005512151A | ||||
| JP2005508018A | ||||
| JP8008169A | ||||
| JP2001154368A | ||||
| JP7057986A | ||||
| JP2005001153A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
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