反射コーティングを備えたミラー要素を有する投影対物系

Title:

反射コーティングを備えたミラー要素を有する投影対物系

Document Type and Number:

Japanese Patent JP5746259

Kind Code:

B2

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Inventors:

Chandany
Manhans Jürgen
Migra Sasha

Application Number:

JP2013097906A

Publication Date:

July 08, 2015

Filing Date:

May 07, 2013

Export Citation:

Assignee:

Carl Zeiss SGM Gaehha

International Classes:

H01L21/027; G02B7/02; G02B19/00; G03F7/20

Domestic Patent References:

Foreign References:

WO2005119369A1
WO2007031271A1

Attorney, Agent or Firm:

Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi

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