PROTECTIVE FILM, AND ITS PRODUCTION

Japanese Patent JP2016204684

A

PROBLEM TO BE SOLVED: To provide a protective film of a segment structure, in which a groove structure is prevented, especially by a structure leading from the side face of a groove to a bottom part of the groove and a structure of the bottom part of the groove, from being broken and damaged by the load deformation stresses of internal and external forces thereby to obtain a segment structure stable in strength.SOLUTION: A protective film has a segment structure, in which a film is stacked on a base material. After the base material is grooved, the protective film is stacked to form a spacing between the segment protective films. The longitudinal sections of portions, in which the groove side face and the bottom of the groove intersect, are jointed by a curve line bulging downward, and the longitudinal section of the bottom of the groove is a curve line bulging downward or a straight line.SELECTED DRAWING: Figure 1

JP2506451	[Title of Invention] Chemical Vapor Deposition Device and Chemical Vapor Deposition Method
WO/2008/042691	PROCESSING SYSTEM CONTAINING A HOT FILAMENT HYDROGEN RADICAL SOURCE FOR INTEGRATED SUBSTRATE PROCESSING
WO/2021/214437	ELECTRODE PRODUCTION PROCESS

MATSUO MAKOTO
HAYASHIDA OKIAKI
IIDA AKIYOSHI

JP2015084478A

December 08, 2016

April 16, 2015

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IMOTT CO LTD

C23C16/04; B23B27/14; B23B27/20; C23C14/04; C23C14/06; C23C16/27

Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Atsushi Ebiya
Yoshihiro Kobayashi
Goji Tasaki

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