Title:
ガス排気用ポンプの回転機構およびその製造方法、並びにその回転機構を備えるガス排気用ポンプ及びその製造方法
Document Type and Number:
Japanese Patent JP5582253
Kind Code:
B2
Abstract:
In a gas exhaust pump, there is provided a rotation mechanism that can ensure safe rotation and can greatly reduce the usage of a seal gas. A rotation mechanism of the present invention is formed of a rotating shaft and a seal housing. Between the rotating shaft and the seal housing, there is provided a predetermined gap. On at least one of an outer surface of the rotating shaft and an inner surface of the seal housing, there is provided a PFA film. As to a PFA film on a surface of at least one of the rotating shaft and the seal housing, after coating with PFA the wall surface of the rotation mechanism member defining at least the gap, followed by melting and remelting processes, the PFA film is formed to have a high smoothness on its free surface.
Inventors:
Iwaki 征道
Tadahiro Omi
Kenji Oyama
Isao Akutsu
Iizuka 肇
Tadahiro Omi
Kenji Oyama
Isao Akutsu
Iizuka 肇
Application Number:
JP2013523787A
Publication Date:
September 03, 2014
Filing Date:
June 27, 2012
Export Citation:
Assignee:
Tohoku University, National University Corporation
Iizuka Iron factory
Iizuka Iron factory
International Classes:
C08F214/26; F04C18/16; C08F216/14; F04C25/02; F04C27/00; F04C29/00
Domestic Patent References:
| JP2001323817A | 2001-11-22 | |||
| JPH0693988A | 1994-04-05 | |||
| JPS62165067A | 1987-07-21 |
Attorney, Agent or Firm:
Patent business corporation A valley and Abe patent firm