Title:
ポンプ、流体制御装置
Document Type and Number:
Japanese Patent JP6394801
Kind Code:
B2
Abstract:
A fluid control device includes a pump and an external structure. The pump includes an actuator, a top portion opposed to the actuator such that a gap is disposed therebetween in the thickness direction, and a side wall plate extending from the top portion in the thickness direction and supporting a vibration member. The actuator includes the plate-like vibration member and a piezoelectric element configured to cause the vibration member to vibrate in the thickness direction. The top portion includes a projection portion and a fixation portion projecting beyond the side wall plate in an outward direction perpendicular to the thickness direction. The top portion is fixed to an external structure outside the projection portion.
Inventors:
Shin Tanaka
Daisuke Kondo
Daisuke Kondo
Application Number:
JP2017517875A
Publication Date:
September 26, 2018
Filing Date:
April 27, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B43/04; F04B45/047
Domestic Patent References:
JP2009250132A |
Foreign References:
WO2014024608A1 | ||||
US20140044568 |
Attorney, Agent or Firm:
Kaede International Patent Office