ガス排気用ポンプシステム及びガス排気方法

Title:

ガス排気用ポンプシステム及びガス排気方法

Document Type and Number:

Japanese Patent JP5499411

Kind Code:

B2

Abstract:

There is provided a gas exhaust pump system capable of suppressing the inclusion of a seal gas into a process gas. The gas exhaust pump system has a main and sub pumps. The main pump has a screw rotor, a rotating shaft, a holding unit, a lubricating oil supply path, a seal housing for covering a periphery of a non-held portion by the holding unit with a predetermined gap formed with an outer periphery of the rotating shaft, a seal member interposed between the rotating shaft and the seal housing, a seal gas supply path for supplying a seal gas to the gap, and a seal gas exhaust path for exhausting the seal gas from the gap to the outside of the main pump. The sub pump is configured to reduce a pressure in the seal gas exhaust path.

Inventors:

Kenji Oyama
Isao Akutsu
Iwaki Seido
Tadahiro Ohmi

Application Number:

JP2013526718A

Publication Date:

May 21, 2014

Filing Date:

June 27, 2012

Export Citation:

Click for automatic bibliography generation Help