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Title:
ポンプ装置及びそのポンプユニット
Document Type and Number:
Japanese Patent JP4955088
Kind Code:
B2
Abstract:
A pump apparatus comprises a low-temperature flat plate group (a low-temperature portion) C having flat plates 5 as a plurality of low-temperature bodies arranged parallel with each other with intervals in a direction crossing a passage 4 of gas, a high-temperature flat plate group (a high-temperature portion) H having flat plates 6 as a plurality of high-temperature bodies arranged parallel with each other with intervals in the direction crossing the passage 4, and temperature operation means for operating at least one of temperatures of the flat plate groups to generate temperature difference between the flat plate groups. The flat plates 5 and the flat plates 6 are displaced from each other in a flow direction in the passage 4, and a heat insulating layer interposed between the flat plates 5 and the flat plates 6.

Inventors:
Hiroshi Sugimoto
Yoshio Sone
Tetsuro Obayashi
Application Number:
JP2010129791A
Publication Date:
June 20, 2012
Filing Date:
June 07, 2010
Export Citation:
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Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
F04B37/06; F04B19/00; F04B19/24; F04B37/16; F04D33/00
Domestic Patent References:
JP61169680A
JP2001223263A
JP62048972A
JP59130519A
JP8510525A
Foreign References:
US5871336
Other References:
曾根 良夫 Yoshio SONE,解説 2,希薄気体力学,鷲尾 旬 社団法人応用物理学会,第54巻
Yoshio Sone,Demonstration of a rarefied gas flow induced near the edge of a uniformly heated plate,Physics of Fluids,米国,American Institute of Physics,1997年,9(11),3530-3534
Attorney, Agent or Firm:
Koji Yamamoto