Title:
熱処理炉排ガスの浄化用触媒、該触媒による熱処理炉排ガスの浄化方法および熱処理炉の汚染防止方法
Document Type and Number:
Japanese Patent JP5366830
Kind Code:
B2
Abstract:
Provided is a catalyst for purifying a discharge gas emitted from a heat-treatment apparatus for burning therein a work coated with a resist material. The catalyst, which is for purifying a discharge gas emitted from a heat-treatment apparatus for burning therein a work coated with a resist material, comprises zeolite particles (ingredient 1) and inorganic-oxide particles having a noble metal deposited thereon (ingredient 2) in an ingredient (1)/ingredient (2) proportion of from 90/10 to 10/90 by weight.
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Inventors:
Takanobu Sakurai
Shinichi Ueno
Shinichi Ueno
Application Number:
JP2009548958A
Publication Date:
December 11, 2013
Filing Date:
January 09, 2009
Export Citation:
Assignee:
Nikki Universal Co., Ltd.
International Classes:
B01J29/12; B01D53/86; B01J23/63; F27D17/00
Domestic Patent References:
| JP2006314867A | 2006-11-24 | |||
| JP2005071632A | 2005-03-17 | |||
| JP2006017357A | 2006-01-19 |
Foreign References:
| WO2005094991A1 | 2005-10-13 |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Ken Matsumoto
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Ken Matsumoto