Title:
液体を被精製物とする精製方法、ケイ素化合物含有液を被精製物とする精製方法、シリル化剤薬液、膜形成用材料又は拡散剤組成物の製造方法、フィルターメディア、及び、フィルターデバイス
Document Type and Number:
Japanese Patent JP6795884
Kind Code:
B2
Abstract:
To provide: a purification method which uses a polyimide and/or polyamide imide porous membrane that exhibits excellent removal performance for impurities such as metals, and wherein a liquid that is a silylating agent liquid, a film forming material or a diffusing agent composition is an object to be purified; a purification method for purifying a silicon compound-containing liquid that contains a silicon compound which is capable of producing a silanol group by hydrolysis; a method for producing a silylating agent liquid, a film forming material or a diffusing agent composition, which uses the purification method; a filter medium which is composed of the above-described porous membrane; and a filter device which comprises the above-described porous membrane. A purification method for purifying a liquid, which comprises a step in which some or all of the liquid is caused to permeate through a polyimide and/or polyamide imide porous membrane having communicating pores from one side to the other side by means of differential pressure, and wherein the liquid is a silylating agent liquid, a film forming material or a diffusing agent composition that is used for diffusing a dopant into a semiconductor substrate.
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Inventors:
Yoshihiro Sawada
Sugawara Tsukasa
Sugawara Tsukasa
Application Number:
JP2015220512A
Publication Date:
December 02, 2020
Filing Date:
November 10, 2015
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
B01D71/64; B01D69/00; B01D71/70; C08G73/06; C08J9/26; H01L21/225
Domestic Patent References:
| JP2010270185A | ||||
| JP2015165009A | ||||
| JP2009138083A | ||||
| JP2008056737A |
Foreign References:
| WO2011155407A1 | ||||
| WO2015020101A1 |
Attorney, Agent or Firm:
Masayuki Masabayashi