Title:
感放射線性樹脂組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JPWO2011108665
Kind Code:
A
Inventors:
Upper part of a river 峰規
Yasuhiko Matsuda
Tomohiro Kakizawa
Yasuhiko Matsuda
Tomohiro Kakizawa
Application Number:
JP2011054967W
Publication Date:
June 27, 2013
Filing Date:
March 03, 2011
Export Citation:
Assignee:
JSR, Inc.
International Classes:
G03F7/039; G03F7/004; C08F22/24; H01L21/027
Attorney, Agent or Firm:
Seiji Kojima
Yoshinori Hagino
Yasuyuki Hiraiwa
Yoshinori Hagino
Yasuyuki Hiraiwa