Title:
熱処理装置の降温レート制御方法および熱処理装置
Document Type and Number:
Japanese Patent JP4365017
Kind Code:
B2
Abstract:
A vertical heat-processing apparatus includes a surrounding member, which surrounds a process chamber and a heater. The surrounding member forms a heating space around the process chamber. The heating space has zones juxtaposed in a vertical direction. Temperature sensors are arranged to detect temperatures respectively representing the zones. Supply pipes are arranged to respectively supply a cooling gas to the zones. The supply pipes are respectively provided with valves controlled by a controller. The controller adjusts opening degrees of the valves such that a flow velocity of the cooling gas in a first zone having a lower cooling rate becomes higher than a flow velocity of the cooling gas in a second zone having a higher cooling rate used as a reference.
Inventors:
Kazuhiko Kato
Application Number:
JP2000252249A
Publication Date:
November 18, 2009
Filing Date:
August 23, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27B5/18; H01L21/22; H01L21/00; H01L21/205; H01L21/324
Domestic Patent References:
| JP7263369A | ||||
| JP1282619A | ||||
| JP1239842A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka