Title:
A recording medium in which a measurement microscope device, an instrumentation method using this, an operation program, and reading in a computer are possible
Document Type and Number:
Japanese Patent JP6218893
Kind Code:
B2
Inventors:
Jun Tabuchi
Shinya Takahashi
Shinya Takahashi
Application Number:
JP2016129448A
Publication Date:
October 25, 2017
Filing Date:
June 29, 2016
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01B11/25; G01B11/02
Domestic Patent References:
| JP2010216838A | ||||
| JP2012037487A | ||||
| JP2006153636A | ||||
| JP2006153575A | ||||
| JP2009264862A | ||||
| JP10124646A |
Foreign References:
| US20100189372 |
Previous Patent: Nano molecular-solid electric thruster
Next Patent: DETECTION AND CONTROL SYSTEM FOR DIGITAL MULTI-FREQUENCY SIGNAL
Next Patent: DETECTION AND CONTROL SYSTEM FOR DIGITAL MULTI-FREQUENCY SIGNAL