Title:
The recording medium which recorded the program for performing thermal treatment equipment, a heat treating method, and a heat treating method for the same
Document Type and Number:
Japanese Patent JP6087323
Kind Code:
B2
Inventors:
Satoshi Kobayashi
Application Number:
JP2014156066A
Publication Date:
March 01, 2017
Filing Date:
July 31, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/324; F27D21/00; H01L21/22; H01L21/31; H05B3/00
Domestic Patent References:
| JP2012109520A | ||||
| JP2005277005A | ||||
| JP2004119804A | ||||
| JP9199491A | ||||
| JP2002353153A | ||||
| JP2006210768A | ||||
| JP9007965A | ||||
| JP2012172871A | ||||
| JP2012209517A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito