Title:
基準尺とその基準尺を備えた位置測定装置
Document Type and Number:
Japanese Patent JP6753788
Kind Code:
B2
Abstract:
A scale for an optically scanning position-measuring device includes a carrier and a reflective layer disposed on the carrier. A transparent spacer layer is disposed on the reflective layer. The spacer layer has a patterned, partially transparent layer thereon which defines a bright/dark pattern in which regions having the partially transparent layer appear dark and regions without the partially transparent layer appear bright. A sealing layer is disposed on the patterned, partially transparent layer. Products of refractive index and layer thickness are the same for the spacer layer and the sealing layer, or differ by an odd multiple.
Inventors:
Stephan Funk
Peter Speckbacher
Peter Speckbacher
Application Number:
JP2017010833A
Publication Date:
September 09, 2020
Filing Date:
January 25, 2017
Export Citation:
Assignee:
DR. JOHANNES HEIDENHAIN GESELLSCHAFT MIT BESCHRANKTER HAFTUNG
International Classes:
G01B11/00; G01D5/347
Domestic Patent References:
| JP2011180160A | ||||
| JP2006300623A | ||||
| JP7318930A | ||||
| JP2016500842A | ||||
| JP2004086328A | ||||
| JP200453576A |
Foreign References:
| US20040090677 | ||||
| WO2015115046A1 | ||||
| DE69506180A1 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Shinsuke Nakamura
Kiyota Eisho
Blacksmith
Shinsuke Nakamura
Kiyota Eisho