Title:
【発明の名称】希ガスの精製方法
Document Type and Number:
Japanese Patent JP2977599
Kind Code:
B2
Abstract:
PURPOSE:To obtain a high-purity purified dilute gas using simple device by combining an iron-zirconium alloy with sponge zirconium and bringing these combined metals into contact with dilute gas each at a prescribed temperature to remove impurities in the dilute gas. CONSTITUTION:Getter A of an alloy consisting of 5-40wt.% iron and 95-60wt.% zirconium and a getter B of sponge zirconium are prepared. Then, a dilute gas is brought into contact with the getter A at 600-800 deg.C and then with getter B at 500-700 deg.C. Thus, nitrogen, hydrocarbon, carbon monoxide, carbon dioxide, oxygen, hydrogen and steam contained as impurities in the dilute gas are removed.
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Inventors:
KITAHARA KOICHI
OOTSUKA KENJI
TAKEMASA NOBORU
KAMYAMA SHINOBU
OOTSUKA KENJI
TAKEMASA NOBORU
KAMYAMA SHINOBU
Application Number:
JP28830690A
Publication Date:
November 15, 1999
Filing Date:
October 29, 1990
Export Citation:
Assignee:
NIPPON PAIONIKUSU KK
International Classes:
B01D53/14; B01D53/04; B01D53/26; B01D53/28; C01B23/00; C22C16/00; (IPC1-7): C01B23/00; B01D53/04; B01D53/26; B01D53/28; C22C16/00
Domestic Patent References:
| JP4160016A | ||||
| JP2116607A |