Title:
不飽和フッ素化炭素化合物の精製方法、フルオロカーボン膜の成膜方法、及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JPWO2007063938
Kind Code:
A
Inventors:
Masahiro Nakamura
Soma Owner 加
Soma Owner 加
Application Number:
JP2006323929W
Publication Date:
June 07, 2007
Filing Date:
November 30, 2006
Export Citation:
Assignee:
Nippon Zeon Co., Ltd.
International Classes:
C07C21/22; C23C16/50; C07C17/389; H01L21/312; C07C21/20; C23C16/30; C07C23/08
Attorney, Agent or Firm:
Haruhito Oishi
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