CATADIOPTRIC PROJECTION OBJECTIVE WITH TILTED DEFLECTING MIRRORS, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD, AND MIRROR

Japanese Patent JP2016095523

A

PROBLEM TO BE SOLVED: To provide catadioptric projection objectives that have tilted deflecting mirrors which allows imaging of patterns including sub-patterns oriented in various directions.SOLUTION: A first deflecting mirror has a first reflective coating with reflectivity R(α) for s-polarized light and a reflectivity R(α) for p-polarized light incident on the first deflecting mirror at first angles of incidence αfrom a first range of angles of incidence according to (t-Δα)≤α<(t+Δα). The second deflecting mirror has a second reflective coating with a reflectivity Rs2(α) for s-polarized light and a reflectivity R(α) for p-polarized light incident on the second deflecting mirror at second angles of incidence αfrom a second range of angles of incidence according to (t-Δα)≤α≤(t+Δα). A first reflectivity sum, R, for s-polarized light of polar edge rays accumulated upon reflection on the first and second deflecting mirrors is substantially equal to a second reflectivity sum, Rfor p-polarized light of equatorial edge rays accumulated upon reflection on the first and second deflecting mirrors.SELECTED DRAWING: Figure 2

RALF MUELLER
GENELMAYER AXEL
WOLFGANG SINGER

JP2015256581A

May 26, 2016

December 28, 2015

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ZEISS CARL SMT GMBH

G03F7/20; G02B19/00

JP2005156592A	2005-06-16
JP2003014921A	2003-01-15
JP2001337210A	2001-12-07
JP2005537676A	2005-12-08
JP2006113533A	2006-04-27
JP2006278979A	2006-10-12
JP2004212979A	2004-07-29

WO2005124420A1

2005-12-29

Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Fumiaki Otsuka
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Hiroshi Oura

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