Title:
軸方向力均衡手段を有する再生式真空ポンプ
Document Type and Number:
Japanese Patent JP5718907
Kind Code:
B2
Inventors:
Scofield Nigel Paul
Liu Michael Chun Cow
Liu Michael Chun Cow
Application Number:
JP2012511349A
Publication Date:
May 13, 2015
Filing Date:
May 18, 2010
Export Citation:
Assignee:
Edwards Limited
International Classes:
F04D23/00; F04D19/04
Domestic Patent References:
| JP2004116509A | ||||
| JP6173880A | ||||
| JP2008223553A | ||||
| JP2004353647A | ||||
| JP200460626A | ||||
| JP3182697A | ||||
| JP2008175084A |
Foreign References:
| WO1999007990A1 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino