Title:
A regulating method and an adjustment of an operation parameter of a vacuum pump apparatus
Document Type and Number:
Japanese Patent JP6270067
Kind Code:
B2
Abstract:
A method for adjusting operating parameters of a vacuum pump arrangement includes determining characteristics of a gas flowing through the vacuum pump arrangement; and setting operating parameters of the vacuum pump arrangement based on the determined characteristics of the first gas. A controller can be configured to perform the method for adjusting the operating parameters of the vacuum pump arrangement in accordance with the characteristics of the gas.
Inventors:
Turner Neil
Tatter sole jack raymond
Tatter sole jack raymond
Application Number:
JP2015512114A
Publication Date:
January 31, 2018
Filing Date:
April 23, 2013
Export Citation:
Assignee:
Edwards Limited
International Classes:
C23C16/44; H01L21/205; H01L21/31
Domestic Patent References:
| JP63109298A | ||||
| JP11006070A | ||||
| JP2005120955A | ||||
| JP2007107398A |
Foreign References:
| US20110200450 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino
Sadao Kumakura
Disciple Maru Ken
Mitsuru Matsushita
Ichiro Kurasawa
Ryohei Yoshino