Title:
A repair method of the Clio pump and the Clio pump
Document Type and Number:
Japanese Patent JP5963459
Kind Code:
B2
Abstract:
A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an external pump and the inside of the housing, a vent valve provided on a passage between the inside and the outside of the housing, and a Pirani gauge which measures a pressure inside the housing. The electrical control unit is connected to each of the purge valve, rough valve, vent valve, and Pirani gauge via a wire. Each of the wires is provided with a connector on the component side and a connector on the electrical control unit side. The connector on the component side is configured to be attachable to and detachable from the connector on the electrical control unit side.
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| JPS59186491 | [Title of the device] The pump case in the Clio pump |
| JP2001342950 | VACUUM DRY PUMP AND TRAPPING METHOD |
| WO/2012/071540 | CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE |
Inventors:
Hidekazu Tanaka
Application Number:
JP2012018834A
Publication Date:
August 03, 2016
Filing Date:
January 31, 2012
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16; F04B39/00
Domestic Patent References:
| JP2009133304A | ||||
| JP2011181246A | ||||
| JP2007309184A | ||||
| JP8074041A | ||||
| JP4089875U |
Foreign References:
| US20020104320 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
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