Title:
フォトレジスト用樹脂組成物
Document Type and Number:
Japanese Patent JPWO2012026465
Kind Code:
A
Inventors:
Onishi 治
Haruo Ikeda
Haruo Ikeda
Application Number:
JP2011068975W
Publication Date:
October 28, 2013
Filing Date:
August 23, 2011
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
C08G8/10; H01L21/027; C08F32/00; G03F7/023
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masatake Shiga