Title:
イマージョンリソグラフィー用レジスト保護膜組成物
Document Type and Number:
Japanese Patent JPWO2008133311
Kind Code:
A
Inventors:
Osamu Yokokoji
Yoko Takebe
Yoko Takebe
Application Number:
JP2008057981W
Publication Date:
November 06, 2008
Filing Date:
April 24, 2008
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
International Classes:
C08L33/14; C08F220/22; G03F7/11; H01L21/027; G03F7/38; C08F232/08
Attorney, Agent or Firm:
Saichi Suyama