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Title:
共振素子および、その製造方法
Document Type and Number:
Japanese Patent JP4962565
Kind Code:
B2
Abstract:
A resonant element is manufactured through a process including a setting step and a forming step. A substrate of the resonant element is made of a dielectric material. A ground electrode is formed on a rear principal surface side of the substrate. Principal-surface electrodes that define resonators together with the ground electrode and the dielectric material are formed on a front principal surface side of the substrate. An electrode protecting layer is formed on substantially entire surfaces on a front principal surface side of the principal-surface electrodes and the substrate. A coupling adjusting electrode with both ends facing a plurality of the principal-surface electrodes is formed on a front principal surface side of the electrode protecting layer. In the setting step, the shape of the coupling adjusting electrode is set in each manufactured lot. In the forming step, the coupling adjusting electrode having the shape set in the setting step in each manufactured lot is formed on the front principal surface side of the substrate and the electrode protecting layer that are sintered in advance, and the coupling adjusting electrode is baked to the electrode protecting layer.

Inventors:
Motoharu Hiroshima
Soichi Nakamura
Taken Yasunori
Hiroshi Mori
Application Number:
JP2009512910A
Publication Date:
June 27, 2012
Filing Date:
April 10, 2008
Export Citation:
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Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H01P11/00; H01P1/203; H01P1/205; H01P5/10; H01P7/08
Domestic Patent References:
JP10190311A
JP3262303A
JP59191902A
Foreign References:
WO2008041398A1
Attorney, Agent or Firm:
Kaede International Patent Office