Title:
The reticulum assembly object applied to a fluid control device and a fluid control device
Document Type and Number:
Japanese Patent JP5919115
Kind Code:
B2
Abstract:
A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.
Inventors:
Masayuki Koji
Hiroshi Itato
Masamasa Okada
Hiroshi Itato
Masamasa Okada
Application Number:
JP2012156094A
Publication Date:
May 18, 2016
Filing Date:
July 12, 2012
Export Citation:
Assignee:
CKD Corporation
International Classes:
B01D1/22; B01J7/02; C23C16/448; F22B1/28; H01L21/31; H05B3/00
Domestic Patent References:
| JP2011040067A1 | ||||
| JP201197088A | ||||
| JP200557193A | ||||
| JP747201A | ||||
| JP11500659A | ||||
| JP6232035A | ||||
| JP2009194246A | ||||
| JP7155584A | ||||
| JP2004363562A | ||||
| JP2008263244A |
Foreign References:
| GB1439603A |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda
Hiroshi Matsuda