Title:
洗浄モジュール内のブラシ洗浄デバイス用ローラアセンブリ
Document Type and Number:
Japanese Patent JP2013506997
Kind Code:
A
Abstract:
Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.
Inventors:
Calpia, Lakshmanan
Chan, Dan
Jaffelberg, Simon
Atkinson, Jim K.
Chen, Han Qi
Cloak, noel
Domin, Jonathan
Chan, Dan
Jaffelberg, Simon
Atkinson, Jim K.
Chen, Han Qi
Cloak, noel
Domin, Jonathan
Application Number:
JP2012532081A
Publication Date:
February 28, 2013
Filing Date:
August 17, 2010
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/304; B08B1/04; F16H13/04
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori