Title:
The rotary part of a vacuum pump, and a vacuum pump
Document Type and Number:
Japanese Patent JP6190580
Kind Code:
B2
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Inventors:
Shinji Kawanishi
Application Number:
JP2012202028A
Publication Date:
August 30, 2017
Filing Date:
September 13, 2012
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04
Domestic Patent References:
| JP3974772B2 | ||||
| JP2005042709A | ||||
| JP2001324104A | ||||
| JP2011196398A | ||||
| JP2009182092A | ||||
| JP2008144695A | ||||
| JP9303289A | ||||
| JP3034699U | ||||
| JP10122179A | ||||
| JP2000337290A |
Foreign References:
| WO2011059893A1 | ||||
| US3877546 |
Attorney, Agent or Firm:
Takamitsu Shimizu
Takakichi Hayashi
Takakichi Hayashi
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