Title:
回転機構および搬送装置
Document Type and Number:
Japanese Patent JP6098187
Kind Code:
B2
Inventors:
Hideya Higuchi
Takeshi Nakamura
Takeshi Nakamura
Application Number:
JP2013012463A
Publication Date:
March 22, 2017
Filing Date:
January 25, 2013
Export Citation:
Assignee:
Nippon Seiko Co., Ltd.
International Classes:
F16C23/10; F16C27/06; H01L21/68
Domestic Patent References:
| JP4127097U | ||||
| JP2006066457A | ||||
| JP2006179751A | ||||
| JP2007103651A |
Foreign References:
| DE102008000204A1 | ||||
| DE1580929A | ||||
| US4783968 |
Attorney, Agent or Firm:
Hiroaki Sakai