Title:
回転機構及び切削装置
Document Type and Number:
Japanese Patent JP6548561
Kind Code:
B2
Inventors:
Yoshida Keigo
Application Number:
JP2015234824A
Publication Date:
July 24, 2019
Filing Date:
December 01, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B41/06
Domestic Patent References:
| JP2015036179A | ||||
| JP5315234A | ||||
| JP2004204339A | ||||
| JP2007292484A | ||||
| JP2003139563A | ||||
| JP7078864A | ||||
| JP2129813U | ||||
| JP2009204567A |
Foreign References:
| WO2007069433A1 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office