酸発生剤用の塩及びレジスト組成物

Title:

酸発生剤用の塩及びレジスト組成物

Document Type and Number:

Japanese Patent JP5598275

Kind Code:

B2

Inventors:

Koji Ichikawa
Mitsuyoshi Ochiai
Masako Sugihara

Application Number:

JP2010252605A

Publication Date:

October 01, 2014

Filing Date:

November 11, 2010

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07D307/93; C07C25/18; C07C381/12; C07D333/46; C09K3/00; G03F7/004; G03F7/039

Attorney, Agent or Firm:

Nakayama 亨
Toru Sakamoto

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