Title:
The salt and the resist composition for acid generators
Document Type and Number:
Japanese Patent JP6009728
Kind Code:
B2
Abstract:
A salt represented by the formula (I-BB): wherein Q1 and Q2 each independently represent a fluorine atom etc., X1 represents a single bond etc., Y1 represents a C1-C36 aliphatic hydrocarbon group etc., A1 and A2 independently each represents a C1-C20 aliphatic hydrocarbon group etc., Ar1 represents a (m4+1)-valent C6-C20 aromatic hydrocarbon group which can have one or more substituents, B1 represents a single bond etc., B2 represents a C4-C36 alicyclic hydrocarbon group which has one or more —OXa groups and which is not capable of being eliminated by the action of an acid etc., and Xa represents a hydrogen atom or a group capable of being eliminated by the action of an acid, m1 and m2 independently each represents an integer of 0 to 2, m3 represents an integer of 1 to 3, with the proviso that m1 plus m2 plus m3 equals 3, and m4 represents an integer of 1 to 3.
Inventors:
Koji Ichikawa
Masako Sugihara
Tatsuro Masuyama
Masako Sugihara
Tatsuro Masuyama
Application Number:
JP2010120686A
Publication Date:
October 19, 2016
Filing Date:
May 26, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07C381/12; C07C309/17; C09K3/00; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2006257078A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation