Title:
試料保持具
Document Type and Number:
Japanese Patent JP7214502
Kind Code:
B2
Abstract:
To provide a sample holding tool that, even when a cycle of temperature increase and decrease is repeated, maintains the horizontalness of a sample holding surface for a long time and can be continuously used for a long period.SOLUTION: A sample holding tool 10 comprises: a plate-like sample holding member 11 that has a top face 11a on which a sample can be mounted and an under surface 11b used for joint; a support member 12 that bears the sample holding member 11; a first spacer 1A for clearance adjustment that is arranged between the sample holding member 11 and the support member 12; and a joint material (resin layer 4) that joins the sample holding member to the support member. The first spacer 1A is formed of resin and has a plate-like shape or a columnar shape, and the area of at least one of an upper end face and a lower end face of the first spacer 1A is larger than the horizontal direction cross-sectional area at the center part in the vertical direction of the first spacer 1A.SELECTED DRAWING: Figure 2
Inventors:
Youhei Nomura
Application Number:
JP2019029712A
Publication Date:
January 30, 2023
Filing Date:
February 21, 2019
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/683
Domestic Patent References:
| JP2003258072A | ||||
| JP2011258837A | ||||
| JP2011238682A | ||||
| JP200317551A | ||||
| JP201612608A |
Attorney, Agent or Firm:
Nishikyo Keiichiro
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