Title:
【発明の名称】走査型分光顕微鏡及び走査型分光情報検出方法
Document Type and Number:
Japanese Patent JP2916167
Kind Code:
B2
Abstract:
A scanning tunnel spectroscope comprises a generator (43) for applying a bias voltage (VT) of a sin wave between a sample (41) and probe (42), an I-V converter (48) for converting a tunnel current flowing when the probe is set close to the sample, to a tunnel current representing voltage signal (IT), a detector (44) for detecting the absolute value of the voltage signal (IT), and a servo circuit (5) for servo-controlling a distance between the sample and probe using the absolute value with the servo time constant set larger than five times the period of the bias voltage. The information concerning the unevenness of the sample is obtained based on an output of the servo control means. A unit (46) is provided for effecting the analog operation to derive a differential conductance based on the tunnel current on the real time basis and measuring the unevenness data and differential conductance data on the real time basis with the distance between the sample and probe kept constant.
Inventors:
OKADA TAKAO
YAGI AKIRA
MORITA SEIZO
MIKOSHIBA NOBUO
YAGI AKIRA
MORITA SEIZO
MIKOSHIBA NOBUO
Application Number:
JP17706389A
Publication Date:
July 05, 1999
Filing Date:
July 11, 1989
Export Citation:
Assignee:
ORINPASU KOGAKU KOGYO KK
International Classes:
G01B7/34; G01N27/00; G01N37/00; G01Q60/10; G01Q60/12; H01J37/00; H01J37/244; H01J37/28; G01Q10/00; (IPC1-7): G01N37/00
Domestic Patent References:
| JP63142202A | ||||
| JP312503A | ||||
| JP2126359U |
Attorney, Agent or Firm:
Atsushi Tsuboi (2 outside)