Title:
マンガン含有フィルムの堆積のためのビス-ピロール-2-アルジミネートマンガン前駆体
Document Type and Number:
Japanese Patent JP2014501847
Kind Code:
A
Abstract:
Disclosed are manganese-containing precursors having the formula (I): wherein each R1 through R5 is independently selected from H; C1-C4 linear or branched alkyl group; C1-C4 linear, branched, or cyclic alkylsilyl group; C1-C4 alkylamino group; and a C1-C4 linear or branched fluoroalkyl group. Also disclosed are method of making the disclosed manganese-containing precursors and methods of using the disclosed manganese-containing precursors to deposit Mn-containing films on a substrate.
Inventors:
Lansarrot-Matlas, Clement
Application Number:
JP2013537246A
Publication Date:
January 23, 2014
Filing Date:
November 03, 2011
Export Citation:
Assignee:
Rail Liquide-Societe Anonym Pools Retude e Rex Prosatation de Procede Georges Claude
International Classes:
C23C16/42; C07D207/335; C23C16/18; H01L21/285; H01L21/3205; H01L21/768; H01L23/532; C07F13/00
Attorney, Agent or Firm:
Kurata Masatoshi
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Toshio Shirane
Takashi Mine
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Toshio Shirane
Takashi Mine
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori