Title:
スクリュー式真空ポンプ
Document Type and Number:
Japanese Patent JP7221672
Kind Code:
B2
Abstract:
To improve temperature situation of a screw-type vacuum pump.SOLUTION: A screw-type vacuum pump (10) has a housing (16), and two screw rotors (28, 30) disposed in the housing (16) in a state of being engaged with each other. The screw-type rotors repeatedly form a conveyance amount in which a process gas is enclosed to convey the same to a direction of an outlet (24) while interacting with the housing (16). The screw-type vacuum pump (10) has a motor (12), the motor is formed as a direct driving portion for one of the screw-type rotors (28), and an active fluid cooling portion is disposed for the screw-type rotors (28, 30) and the motor (12).SELECTED DRAWING: Figure 1
Inventors:
Peter Hoover
Application Number:
JP2018232381A
Publication Date:
February 14, 2023
Filing Date:
December 12, 2018
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04C18/16; F04C25/02; F04C29/04
Domestic Patent References:
| JP2001520352A | ||||
| JP2005509786A | ||||
| JP200838764A | ||||
| JP9308183A | ||||
| JP2004350466A |
Foreign References:
| DE202016005209U1 |
Attorney, Agent or Firm:
Esaki Mitsufumi
Blacksmith Minoru Sawa
Shinsuke Nakamura
Ishida Taisei
Tomoko Suzuki
Blacksmith Minoru Sawa
Shinsuke Nakamura
Ishida Taisei
Tomoko Suzuki