Title:
軸方向の熱膨張が制御されたスクロールポンプ
Document Type and Number:
Japanese Patent JP2008516146
Kind Code:
A
Abstract:
Vacuum pumping apparatus includes a pump frame, a stationary scroll element secured to the pump frame, the stationary scroll element including a stationary scroll blade, an orbiting scroll element including an orbiting scroll blade intermeshed with the stationary scroll blade, a motor secured to the pump frame, and a crankshaft coupled between the motor and the orbiting scroll element for producing orbiting movement of the orbiting scroll blade relative to the stationary scroll blade when the motor is energized. The crankshaft includes a first component having a first coefficient of thermal expansion and a second component having a second coefficient of thermal expansion.
Inventors:
Lipert, Anthony, Gee.
Warren, Jeffrey, Sea.
Curry, robert, em., junior
Warren, Jeffrey, Sea.
Curry, robert, em., junior
Application Number:
JP2007535740A
Publication Date:
May 15, 2008
Filing Date:
September 30, 2005
Export Citation:
Assignee:
Varian, Incorporated
International Classes:
F04C18/02; F04C25/02; F04C27/00; F04C29/00
Domestic Patent References:
| JPS61197784A | 1986-09-02 | |||
| JP2000145669A | 2000-05-26 | |||
| JP2001123973A | 2001-05-08 | |||
| JPS6180380U | 1986-05-28 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Hiroyuki Okamoto
Mio Kawasaki
Hiroyuki Okamoto