Title:
A section processing observation method and a device
Document Type and Number:
Japanese Patent JP5969233
Kind Code:
B2
Abstract:
A cross-section processing and observation method including: acquiring a surface image by scanning and irradiating a surface of a sample with ion beam; setting, on the surface image, a first sliced region and a second sliced region for performing the slice processing, the second sliced region being adjacent to the first sliced region and having a longitudinal length obtained by subtracting a slice width of the second sliced region from a longitudinal length of the first sliced region; forming a cross-section by irradiating the first sliced region and the second sliced region with the ion beam; and acquiring a cross-sectional image by irradiating the cross-section with electron beam.
Inventors:
Fullness
Application Number:
JP2012065974A
Publication Date:
August 17, 2016
Filing Date:
March 22, 2012
Export Citation:
Assignee:
Hitachi High-Tech Science Co., Ltd.
International Classes:
H01J37/317; G01N1/28; G01N23/225
Domestic Patent References:
| JP2009139379A | ||||
| JP10050246A | ||||
| JP2008270073A | ||||
| JP2009204480A |
Attorney, Agent or Firm:
Patent business corporation glory patent office
Yuriko Hamada
Kimihide Hashimoto
Yoshiaki Masaaki
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Yuriko Hamada
Kimihide Hashimoto
Yoshiaki Masaaki
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
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