Title:
A selection method of material which constitutes a vacuum device, a formation method of organic membrane, a manufacturing method of an organic EL device, an organic EL display panel, an organic EL display, an organic EL luminescent device, and gette material
Document Type and Number:
Japanese Patent JP5994080
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum device and the like which can eliminate impurity contamination on the surface of an organic film material as much as possible.SOLUTION: The vacuum device includes a vacuum chamber 1 for housing an organic film material, a vacuum pump 2, and an exhaust pipe 3 connecting the vacuum chamber 1 and the vacuum pump 2. A getter material 4 of the same material as the organic film material is arranged in the exhaust pipe 3.
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Inventors:
Toshiki Nishikori
Yu Yuasa
Yu Yuasa
Application Number:
JP2012091888A
Publication Date:
September 21, 2016
Filing Date:
April 13, 2012
Export Citation:
Assignee:
Joled Co., Ltd.
International Classes:
H05B33/10; F04B37/16; H01L51/50
Domestic Patent References:
| JP2008064072A | ||||
| JP2010169308A | ||||
| JP2011044380A | ||||
| JP2001107858A | ||||
| JP2009093972A |
Foreign References:
| WO2005093120A1 | ||||
| WO2013145640A1 | ||||
| US20150087098 |
Attorney, Agent or Firm:
Patent business corporation Nakajima intellectual property integrated office
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