Title:
半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
Document Type and Number:
Japanese Patent JP4042244
Kind Code:
B2
More Like This:
Inventors:
Tomonari Yoshiaki
Hitoshi Yoshida
Kamakura
Hiroshi Kawada
Kimito Saito
Kazuhiro Shintoki
Hitoshi Yoshida
Kamakura
Hiroshi Kawada
Kimito Saito
Kazuhiro Shintoki
Application Number:
JP4559299A
Publication Date:
February 06, 2008
Filing Date:
February 23, 1999
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
B25J7/00; B62D57/00; B25J19/00; B81B3/00; B81B5/00; F03G7/06; F16K31/02; F16K31/70; H01H37/14; H01H37/52
Domestic Patent References:
JP10255637A | ||||
JP9088804A | ||||
JP7259725A | ||||
JP7032276A | ||||
JP8210519A | ||||
JP9126116A | ||||
JP4506392A |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori