Title:
A semiconductor pressure sensor and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6249865
Kind Code:
B2
Inventors:
Naoki Takayama
Application Number:
JP2014075678A
Publication Date:
December 20, 2017
Filing Date:
April 01, 2014
Export Citation:
Assignee:
Fujikura Ltd.
International Classes:
G01L9/00
Domestic Patent References:
| JP2009282015A | ||||
| JP8035896A | ||||
| JP2004340891A |
Foreign References:
| DE102006034110A1 | ||||
| DE102007027708A1 |
Attorney, Agent or Firm:
Masatake Shiga
Sumio Tanai
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu
Sumio Tanai
Mitsunaga Igarashi
Toshio Komuro
Yuichiro Shimizu
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