Title:
センサチップ
Document Type and Number:
Japanese Patent JP7406947
Kind Code:
B2
Abstract:
To provide a technique capable of suppressing that stress generated at a fixed section fixed to a base affects a diaphragm section.SOLUTION: A sensor chip may include: a diaphragm section to which pressure is applied; and a support section that is fixed to an outer peripheral end of the diaphragm section to support the diaphragm section and is configured to be thicker than the thickness of the diaphragm section. The support section may include: a first groove section extending in a thickness direction around the outer peripheral end of the diaphragm section; and a fixed section fixed to a base outside of the first groove section.SELECTED DRAWING: Figure 1
Inventors:
Masashi Nishida
Application Number:
JP2019174118A
Publication Date:
December 28, 2023
Filing Date:
September 25, 2019
Export Citation:
Assignee:
Aichi Clock Electric Co., Ltd.
International Classes:
G01L9/00; H01L29/84
Domestic Patent References:
| JP200832451A | ||||
| JP2007132942A | ||||
| JP2005227283A |
Foreign References:
| KR20080029555A |
Attorney, Agent or Firm:
Patent Attorney Corporation Kaiyu International Patent Office