Title:
センサ装置
Document Type and Number:
Japanese Patent JP7445371
Kind Code:
B2
Abstract:
An object is to provide a sensor device capable of highly accurately detecting a flow rate at 360 degrees in a radial direction with respect to a first sensor element including a resistive element for flow rate detection. A sensor device according to the present invention includes a substrate, a first sensor element including a resistive element for flow rate detection, and a second sensor element including a resistive element for temperature compensation. Each of the first sensor element and the second sensor element is supported to be separated from a surface of the substrate via a pair of lead wires, and the first sensor element is disposed at a higher position than the second sensor element.
Inventors:
Yasuyuki Katase
Toshiya Yasue
Toshiya Yasue
Application Number:
JP2021010735A
Publication Date:
March 07, 2024
Filing Date:
January 27, 2021
Export Citation:
Assignee:
KOA Co., Ltd.
International Classes:
G01P5/12
Domestic Patent References:
| JP2170017A | ||||
| JP2020051755A | ||||
| JP2000329599A | ||||
| JP4029017A |
Foreign References:
| US20070250276 |
Attorney, Agent or Firm:
Infot Patent Attorney Corporation
Hiroyoshi Aoki
Masayuki Amada
Miwa Masayoshi
Hiroyoshi Aoki
Masayuki Amada
Miwa Masayoshi