Title:
A sensor element and a pressure sensor
Document Type and Number:
Japanese Patent JP6196144
Kind Code:
B2
More Like This:
| WO/2017/087370 | FIT-CHECK DEVICE |
Inventors:
Toshiyuki Matsuoka
Moritaka
Takuya Mizuno
Yoshinori Tsujimura
Moritaka
Takuya Mizuno
Yoshinori Tsujimura
Application Number:
JP2013258824A
Publication Date:
September 13, 2017
Filing Date:
December 16, 2013
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
G01L1/10; B81B3/00; G01L9/00; H01L29/84
Domestic Patent References:
| JP2000055670A | ||||
| JP2000511282A |
Foreign References:
| US20030005768 |
Attorney, Agent or Firm:
Meisei International Patent Office
Hideki Watanabe
Hideki Watanabe
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