Title:
センサシステム
Document Type and Number:
Japanese Patent JP7334165
Kind Code:
B2
Abstract:
A system, comprising an optical component that, in operational use of the optical component, optically interacts with a laser beam, an electrically conductive element disposed on or within the optical component that, in operational use of the optical component, is exposed to the laser beam, and a monitoring system operative to monitor a physical quantity representative of an electrical resistance of the electrically conductive element and to determine based on the physical quantity, a position of the laser beam relative to the optical component.
Inventors:
Smolarek, Simon, Dominique
Application Number:
JP2020539831A
Publication Date:
August 28, 2023
Filing Date:
January 24, 2019
Export Citation:
Assignee:
ASM L Netherlands B.V.
International Classes:
G03F7/20; H05G2/00
Domestic Patent References:
| JP2015190934A | ||||
| JP2016509343A |
Foreign References:
| US3939706 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito