Title:
Sensor with protective layer
Document Type and Number:
Japanese Patent JP6363180
Kind Code:
B2
Abstract:
A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.
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Inventors:
Cook, Richard A
Gonella, George
Moon,sun in
Charles W. Exstrand
Pillion, john yee
Gonella, George
Moon,sun in
Charles W. Exstrand
Pillion, john yee
Application Number:
JP2016517962A
Publication Date:
July 25, 2018
Filing Date:
June 04, 2014
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
G01L19/06; G01F1/00; G01F1/34; G01N11/00
Domestic Patent References:
| JP2012137435A | ||||
| JP2010284897A | ||||
| JP2008008712A | ||||
| JP7307479A |
Foreign References:
| US20040200287 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation